Alloy sputtering targets are materials composed of one metal and other metals or non-metals while still showing the some metallic characteristics. Alloy is usually obtained by fusing the respective molten components and cooling from high temperature to become condensates.Alloys have much more extensive and important industrial applications than pure metals, so people seldom use pure metals but alloys instead in daily life.
● 钛 (Ti)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Titanium Alloys
|
钼钛合金
|
MoTi
|
3N
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
钨钛合金
|
WTi
|
4N
|
铝钛合金
|
AlTi
|
3N
|
镍钛合金
|
NiTi
|
3N
|
锆钛合金
|
ZrTi
|
3N
|
铌钛合金
|
NbTi
|
3N
|
钛铬合金
|
TiCr
|
2N5-3N
|
钛硅合金
|
TiSi
|
3N
|
钛钒合金
|
TiV
|
3N
|
铜钛合金
|
CuTi
|
3N
|
铝钛硼
|
AlTiB
|
3N
|
钛铝钒
|
TiAlV
|
3N
|
钛锌钒铪
|
TiZnVHf
|
3N
|
● 锆 (Zr)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Zirconium Alloys
|
铝锆合金
|
AlZr
|
2N5
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
铜锆合金
|
CuZr
|
2N5
|
锆硅合金
|
ZrSi
|
2N5
|
锆钛合金
|
ZrTi
|
2N5
|
锆铌合金
|
ZrNb
|
2N5
|
● 钽 (Ta)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Tantalum Alloy
|
钛钽合金
|
TiTa
|
99.9%
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
铝钽合金
|
AlTa
|
99.9%
|
镍钽合金
|
NiTa
|
99.9%
|
钒钽合金
|
VTa
|
99.9%
|
钼钽合金
|
MoTa
|
99.9%
|
钒钽钼合金
|
VTaMo
|
99.9%
|
● 镍 (Ni)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Nickel Alloy
|
镍钒合金
|
NiV
|
3N
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
镍铬合金
|
NiCr
|
3N
|
铜镍合金
|
NiCu
|
3N
|
镍钛合金
|
NiTi
|
3N
|
● 钯 (Pd)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Palladium Alloy
|
钯镍合金
|
PdNi
|
3N5
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
银钯合金
|
AgPd
|
3N5
|
铜钯合金
|
CuPd
|
3N5
|
银铜钯合金
|
AgCuPd
|
3N5
|
钯硅合金
|
PdSi
|
3N5
|
金钯合金
|
AuPd
|
3N5
|
● 铌 (Nb)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Niobium Alloy
|
钼铌合金
|
MoNb
|
3N-3N5
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
锆铌合金
|
ZrNb
|
3N
|
铌钛合金
|
NiTi
|
3N
|
钽铌合金
|
TaNb
|
3N
|
铌铁合金
|
NbFe
|
3N
|
铌碳合金
|
NbC
|
3N
|
● 钼 (Mo)
Material
|
Name
|
Symbol
|
Purity
|
Shape
|
Customization
|
Molybdenum Alloy
|
钼铌合金
|
MoNb
|
3N
|
Discs
Plates
Column Targets
Step Targets
|
YES
|
钼钒合金
|
MoV
|
3N
|
钼铁合金
|
MoFe
|
3N
|
钼硅合金
|
MoSi
|
3N
|
钼钨合金
|
MoW
|
3N
|
钴钼合金
|
CoMo
|
3N
|
|